Sub-Half-Micron Lithography for ULSIs
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Sub-Half-Micron Lithography for ULSIs

SKU: 9780521022347

Original price was: ₹3,332.00.Current price is: ₹3,332.00.

Unlock the future of semiconductor manufacturing with essential sub-micron lithography. This definitive guide details cutting-edge techniques vital for Ultra-Large-Scale Integration (ULSI) fabrication. Expert chapters illuminate advanced methods like Deep UV, X-ray, electron-beam, and focused ion-beam lithography, explaining their core principles for next-generation microelectronics. A must-read for Indian researchers, electrical engineering professionals, and students advancing semiconductor device fabrication. Master the innovations driving microchip technology.

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