Achieve critical nanometer accuracy in substrate surface preparation with this indispensable guide. Master essential lapping, polishing, and advanced finishing techniques crucial for semiconductor devices and integrated circuits. This practical, one-stop reference provides engineers and technicians with detailed, hands-on guidance covering maintenance methods and equipment, supported by over 125 illustrations. It’s a must-have for professionals and students in optics production and semiconductor manufacturing, ensuring desired results and preventing costly trial-and-error in material processing.