Discover the groundbreaking Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines, a pivotal work from the MEMS Reference Shelf. This book details the innovative research behind the MIT Gas Turbine Engine, a marvel of silicon fabrication using advanced microfabrication technologies. Explore the intricate technical aspects and system-level decisions that led to the creation of this revolutionary engine, including its motor compressors and turbine generators. Essential for engineers and researchers in MEMS, this comprehensive guide offers deep insights into the design, fabrication, and potential of micro-scale rotating machinery. Elevate your understanding of cutting-edge MEMS technology with this definitive reference.