Lecture Notes on Principles of Plasma Processing
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Lecture Notes on Principles of Plasma Processing

SKU: 9780306474972

Original price was: ₹15,598.96.Current price is: ₹11,699.22.

Unlock the secrets of plasma processing with ‘Lecture Notes on Principles of Plasma Processing’ from The Bookish Owl. This essential guide bridges the gap between plasma physics and chemical engineering for semiconductor applications. Written by leading experts, it offers a clear introduction to plasma concepts for those with undergraduate electromagnetics backgrounds but no prior plasma experience. Dive deep into critical topics like sheath structure without overwhelming derivations, and gain insights into chemical kinetics, surface science, and molecular spectroscopy relevant to low-temperature plasmas. Covering current challenges such as copper interconnects, dielectrics, and oxide damage, this concise book is perfect for graduate students, new industry professionals, chemical engineers, physicists, and technicians seeking a rapid, comprehensive understanding of plasma technology in the semiconductor industry.

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Description

  • ISBN-10: 9780306474972
  • ISBN-13: 978-0306474972
  • Edition: 2003rd
  • Publication date: 31 January 2003
  • Language: English
  • Dimensions: 21.01 x 1.3 x 27.89 cm
  • Print length: 208 pages

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